Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412592 | Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device | Shingo Kanamitsu | 2016-08-09 |
| 9377682 | Template substrate, method for manufacturing same, and template | Shingo Kanamitsu | 2016-06-28 |