Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9370920 | Electrostatic chuck, mount plate support, and manufacturing method of electrostatic chuck | Yasuhiro Nojiri, Makoto Saito | 2016-06-21 |
| 9236229 | Gas supply member, plasma treatment method, and method of forming yttria-containing film | Rikyu IKARIYAMA, Makoto Saito, Sachiyo Ito | 2016-01-12 |