Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236229 | Gas supply member, plasma treatment method, and method of forming yttria-containing film | Hideo Eto, Makoto Saito, Sachiyo Ito | 2016-01-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236229 | Gas supply member, plasma treatment method, and method of forming yttria-containing film | Hideo Eto, Makoto Saito, Sachiyo Ito | 2016-01-12 |