Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268225 | Composition, resist pattern-forming method, compound, method for production of compound, and polymer | Kiyoshi Tanaka, Shinya Minegishi, Kazunori Kusabiraki | 2016-02-23 |
| 9261789 | Liquid immersion lithography upper-layer film-forming composition and photoresist pattern-forming method | Kazunori Kusabiraki, Yukio Nishimura, Ken MARUYAMA, Kiyoshi Tanaka | 2016-02-16 |