Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412593 | Composition for film formation, resist underlayer film, and forming method of resist underlayer film, and pattern-forming method | Hayato Namai | 2016-08-09 |
| 9259668 | Cleaning method of immersion liquid, immersion liquid cleaning composition, and substrate | Kentaro Harada | 2016-02-16 |