Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9256068 | Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument | Hidetaka Sawada | 2016-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9256068 | Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument | Hidetaka Sawada | 2016-02-09 |