Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9363442 | Information processing device, information processing method, and program | Kaoru Hatta | 2016-06-07 |
| 9287137 | Methods for depositing a silicon containing layer with argon gas dilution | Qunhua Wang, Young Jin Choi, Seon-Mee Cho, Yi Cui, Beom Soo Park +1 more | 2016-03-15 |