Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245767 | Anneal module for semiconductor wafers | Gregory J. Wilson, Kyle M. Hanson, Paul Z. Wirth, Robert B. Moore | 2016-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245767 | Anneal module for semiconductor wafers | Gregory J. Wilson, Kyle M. Hanson, Paul Z. Wirth, Robert B. Moore | 2016-01-26 |