Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399827 | Microelectronic substrate electro processing system | David Silvetti, Paul Z. Wirth, Randy Harris | 2016-07-26 |
| 9245767 | Anneal module for semiconductor wafers | Vincent Steffan Francischetti, Gregory J. Wilson, Kyle M. Hanson, Paul Z. Wirth | 2016-01-26 |