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Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device |
Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Junichi Horikawa |
2016-11-29 |
| 9494851 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method |
Toshihiko Orihara, Kazuhiro Hamamoto, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa |
2016-11-15 |
| 9488904 |
Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same |
Toshihiko Orihara, Akihiro Kawahara |
2016-11-08 |
| 9423685 |
Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask |
Kazuhiro Hamamoto |
2016-08-23 |
| 9377679 |
Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device |
Kazuhiro Hamamoto, Tatsuo Asakawa, Osamu Maruyama |
2016-06-28 |
| 9348217 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method |
Kazuhiro Hamamoto, Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Junichi Horikawa |
2016-05-24 |
| 9323141 |
Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask |
Kazuhiro Hamamoto |
2016-04-26 |
| 9229316 |
Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask |
Kazuhiro Hamamoto |
2016-01-05 |