Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488904 | Mask blank glass substrate, multilayer reflective film coated substrate, mask blank, mask, and methods of manufacturing the same | Toshihiko Orihara, Tsutomu Shoki | 2016-11-08 |