Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401295 | Load port apparatus and clamping device to be used for the same | Hiroshi Igarashi | 2016-07-26 |
| 9349627 | Lid opening/closing system for closed container and substrate processing method using same | Jun Emoto | 2016-05-24 |