Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349627 | Lid opening/closing system for closed container and substrate processing method using same | Tsutomu Okabe | 2016-05-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349627 | Lid opening/closing system for closed container and substrate processing method using same | Tsutomu Okabe | 2016-05-24 |