Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9475167 | Polishing apparatus having temperature regulator for polishing pad | Tadakazu Sone, Yasuyuki Motoshima | 2016-10-25 |
| 9388157 | Bicyclic compound and use thereof for medical purposes | Tohru Kambe, Shinsaku Yamane, Satoshi Nakayama, Kousuke Tani | 2016-07-12 |
| 9381614 | Pressure regulator, polishing apparatus having the pressure regulator, and polishing method | Nobuyuki Takahashi | 2016-07-05 |
| 9370852 | Pressure regulator and polishing apparatus having the pressure regulator | Nobuyuki Takahashi, Suguru Sakugawa | 2016-06-21 |
| 9373528 | Substrate processing apparatus | Mitsunori Komatsu | 2016-06-21 |
| 9233448 | Adjusting a substrate polishing condition | Yasuyuki Motoshima | 2016-01-12 |