Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9475167 | Polishing apparatus having temperature regulator for polishing pad | Toru Maruyama, Tadakazu Sone | 2016-10-25 |
| 9233448 | Adjusting a substrate polishing condition | Toru Maruyama | 2016-01-12 |