Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478602 | Method of forming an embedded metal-insulator-metal (MIM) capacitor | Robert Seidel | 2016-10-25 |
| 9305878 | Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects | Carsten Peters, Andreas Ott, Axel Preusse | 2016-04-05 |
| 9287109 | Methods of forming a protection layer to protect a metal hard mask layer during lithography reworking processes | Keith Donegan, Robert Seidel | 2016-03-15 |
| 9257329 | Methods for fabricating integrated circuits including densifying interlevel dielectric layers | Oliver Mieth, Carsten Peters | 2016-02-09 |