Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530704 | Polishing apparatus and wear detection method | Ryuichi Kosuge | 2016-12-27 |
| 9522453 | Polishing apparatus | Hideo Aizawa, Masao Umemoto, Ryuichi Kosuge | 2016-12-20 |
| 9475167 | Polishing apparatus having temperature regulator for polishing pad | Toru Maruyama, Yasuyuki Motoshima | 2016-10-25 |
| 9409277 | Polishing apparatus and polishing method | Masao Umemoto, Hideo Aizawa, Ryuichi Kosuge, Masaaki Eriguchi | 2016-08-09 |