Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506154 | Plasma processing method | Masato Ishimaru, Makoto Suyama, Takahiro Abe | 2016-11-29 |
| 9449842 | Plasma etching method | Masato Ishimaru, Takahiro Abe, Makoto Suyama | 2016-09-20 |
| 9230782 | Plasma processing method and apparatus | Eiji Ikegami, Shoji Ikuhara, Kenichi Kuwabara, Takao Arase, Tsuyoshi Matsumoto | 2016-01-05 |