MS

Makoto Suyama

HH Hitachi High-Technologies: 5 patents #14 of 444Top 4%
Overall (2016): #25,796 of 481,213Top 6%
5
Patents 2016

Issued Patents 2016

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
9506154 Plasma processing method Masato Ishimaru, Takeshi Shimada, Takahiro Abe 2016-11-29
9449842 Plasma etching method Masato Ishimaru, Takahiro Abe, Takeshi Shimada 2016-09-20
9378758 Plasma etching method Takahiro Abe, Naohiro Yamamoto, Kentaro Yamada, Daisuke Fujita 2016-06-28
9281470 Plasma processing method Takahiro Abe, Naohiro Yamamoto, Masato Ishimaru 2016-03-08
9269892 Plasma etching method Daisuke Fujita, Naohiro Yamamoto, Masato Ishimaru, Kentaro Yamada 2016-02-23