Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447365 | Enhanced cleaning process of chamber used plasma spray coating without damaging coating | Jennifer Y. Sun | 2016-09-20 |
| 9358702 | Temperature management of aluminium nitride electrostatic chuck | Jennifer Y. Sun, Douglas A. Buchberger, Jr., Shane C. Nevil | 2016-06-07 |