Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Martin Jeff Salinas +1 more | 2016-12-06 |
| 9461137 | Tungsten silicide nitride films and methods of formation | Jothilingam Ramalingam, Jianxin Lei, Zhiyong Wang | 2016-10-04 |