Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442364 | Mask blank for reflection-type exposure, and mask for reflection-type exposure | Yutaka KODERA, Yo Sakata | 2016-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442364 | Mask blank for reflection-type exposure, and mask for reflection-type exposure | Yutaka KODERA, Yo Sakata | 2016-09-13 |