Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506154 | Plasma processing method | Takeshi Shimada, Makoto Suyama, Takahiro Abe | 2016-11-29 |
| 9449842 | Plasma etching method | Takahiro Abe, Makoto Suyama, Takeshi Shimada | 2016-09-20 |
| 9281470 | Plasma processing method | Takahiro Abe, Naohiro Yamamoto, Makoto Suyama | 2016-03-08 |
| 9269892 | Plasma etching method | Daisuke Fujita, Makoto Suyama, Naohiro Yamamoto, Kentaro Yamada | 2016-02-23 |