Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513559 | High numerical aperture objective lens system | — | 2016-12-06 |
| 9411244 | Optical system, inspection system and manufacturing method | Yuli Vladimirsky, James H. Walsh | 2016-08-09 |
| 9285687 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Stanislav Smirnov, Eric Brian Catey, Adel Joobeur, David Heald, Yevgeniy Konstantinovich Shmarev +1 more | 2016-03-15 |