Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9285687 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Stanislav Smirnov, Lev Ryzhikov, Eric Brian Catey, David Heald, Yevgeniy Konstantinovich Shmarev +1 more | 2016-03-15 |