Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9386680 | Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber | Shilpa Sudhakaran, Mohamad A. Ayoub | 2016-07-05 |