Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372391 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Akira Fujimura | 2016-06-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372391 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Akira Fujimura | 2016-06-21 |