Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425036 | Light source device and semiconductor manufacturing apparatus including the same | Wook Kim, Won-Don Joo, Kwang Soo Kim, Byeong Hwan Jeon, Sue-Jin Cho | 2016-08-23 |
| 9374883 | Plasma light source apparatus and plasma light generating method | Young Kyu Park, Wook Kim, Byeong Hwan Jeon | 2016-06-21 |