Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266713 | MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone | Leif Steen Johansen, Jan Tue Ravnkilde, Pirmin Hermann Otto Rombach, Kurt Rasmussen | 2016-02-23 |