Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382109 | MEMS microphone with reduced parasitic capacitance | Leif Steen Johansen, Pirmin Hermann Otto Rombach, Kurt Rasmussen | 2016-07-05 |
| 9369066 | MEMS device comprising an under bump metallization | Leif Steen Johansen | 2016-06-14 |
| 9319765 | MEMS microphone assembly and method of manufacturing the MEMS microphone assembly | — | 2016-04-19 |
| 9266713 | MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone | Leif Steen Johansen, Pirmin Hermann Otto Rombach, Kurt Rasmussen, Dennis Mortensen | 2016-02-23 |