Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524854 | Electrostatic remote plasma source system and method | Daniel Carter, Victor Brouk, Karen Peterson, Randy Grilley | 2016-12-20 |
| 9435029 | Wafer chucking system for advanced plasma ion energy processing systems | Victor Brouk | 2016-09-06 |
| 9362089 | Method of controlling the switched mode ion energy distribution system | Victor Brouk, Daniel Carter | 2016-06-07 |
| 9309594 | System, method and apparatus for controlling ion energy distribution of a projected plasma | Victor Brouk, Daniel Carter | 2016-04-12 |
| 9287086 | System, method and apparatus for controlling ion energy distribution | Victor Brouk, Randy Heckman | 2016-03-15 |