Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524854 | Electrostatic remote plasma source system and method | Daniel J. Hoffman, Victor Brouk, Karen Peterson, Randy Grilley | 2016-12-20 |
| 9362089 | Method of controlling the switched mode ion energy distribution system | Victor Brouk, Daniel J. Hoffman | 2016-06-07 |
| 9309594 | System, method and apparatus for controlling ion energy distribution of a projected plasma | Daniel J. Hoffman, Victor Brouk | 2016-04-12 |