Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop | 2016-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Theodore A. Prescop | 2016-10-11 |