Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478395 | Alignment and registration targets for multiple-column charged particle beam lithography and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2016-10-25 |
| 9466463 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Cong Tran | 2016-10-11 |
| 9466464 | Precision substrate material removal using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2016-10-11 |
| 9453281 | Precision deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Michael C. Smayling | 2016-09-27 |