Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324598 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Terry Bluck | 2016-04-26 |
| 9318332 | Grid for plasma ion implant | Vinay Prabhakar | 2016-04-19 |
| 9303314 | Ion implant system having grid assembly | Moon Chun | 2016-04-05 |