Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524896 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2016-12-20 |
| 9525099 | Dual-mask arrangement for solar cell fabrication | Ian Latchford, Vinay Shah, Alex Riposan | 2016-12-20 |
| 9502276 | System architecture for vacuum processing | Vinay Shah, Alex Riposan | 2016-11-22 |
| 9324598 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Babak Adibi | 2016-04-26 |