Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Eldar Khaliullin, Ingo Bork | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Eldar Khaliullin, Ingo Bork | 2016-07-26 |