Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330985 | Automated hybrid metrology for semiconductor device fabrication | Ned R. Saleh, Matthew Sendelbach, Narender Rana | 2016-05-03 |
| 9281249 | Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure | Abner Bello, Sipeng Gu, Lokesh Subramany, Xiang Hu, Akshey Sehgal | 2016-03-08 |