Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9323157 | Mirror assembly for an exposure apparatus | Douglas C. Watson | 2016-04-26 |
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Douglas C. Watson, Hiromitsu Yoshimoto, Yusaku Uehara | 2016-04-05 |