Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530688 | Directed self assembly of block copolymers to form vias aligned with interconnects | Swaminathan Sivakumar, Robert L. Bristol | 2016-12-27 |
| 9431518 | Patterning of vertical nanowire transistor channel and gate with directed self assembly | Swaminathan Sivakumar | 2016-08-30 |
| 9285682 | Pre-patterned hard mask for ultrafast lithographic imaging | Robert L. Bristol, Charles H. Wallace | 2016-03-15 |
| 9269630 | Patterning of vertical nanowire transistor channel and gate with directed self assembly | Swaminathan Sivakumar | 2016-02-23 |