Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9495499 | Compensation of dose inhomogeneity using overlapping exposure spots | Elmar Platzgummer | 2016-11-15 |
| 9269543 | Compensation of defective beamlets in a charged-particle multi-beam exposure tool | Elmar Platzgummer, Klaus Schiessel | 2016-02-23 |