Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520268 | Compensation of imaging deviations in a particle-beam writer using a convolution kernel | — | 2016-12-13 |
| 9495499 | Compensation of dose inhomogeneity using overlapping exposure spots | Rafael Reiter | 2016-11-15 |
| 9443699 | Multi-beam tool for cutting patterns | Hans Loschner | 2016-09-13 |
| 9373482 | Customizing a particle-beam writer using a convolution kernel | — | 2016-06-21 |
| 9269543 | Compensation of defective beamlets in a charged-particle multi-beam exposure tool | Rafael Reiter, Klaus Schiessel | 2016-02-23 |