Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520298 | Plasma method for reducing post-lithography line width roughness | Peter De Schepper, Jean-Francois de Marneffe | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520298 | Plasma method for reducing post-lithography line width roughness | Peter De Schepper, Jean-Francois de Marneffe | 2016-12-13 |