Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, Jürgen Frosien, Matthias Firnkes, Johannes Hopster | 2016-10-18 |
| 9349566 | Charged particle beam device, beam deflector device and methods of operating thereof | — | 2016-05-24 |