Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, John Breuer, Jürgen Frosien, Matthias Firnkes | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472373 | Beam separator device, charged particle beam device and methods of operating thereof | Stefan Lanio, John Breuer, Jürgen Frosien, Matthias Firnkes | 2016-10-18 |