Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Norbert Bowering | 2016-07-12 | $8,748,000 |
| 9279445 | Droplet generator steering system | J. Martin Algots, Abhiram Govindaraju, Chirag Rajyaguru | 2016-03-08 | $4,909,000 |