Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2016-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2016-07-12 |