Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436079 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Hiroaki Shishido, Kazuya Sakai | 2016-09-06 |
| 9372393 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Hiroyuki Iwashita, Masahiro Hashimoto | 2016-06-21 |
| 9354509 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Noriyuki SAKAYA | 2016-05-31 |
| 9256122 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2016-02-09 |