Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436079 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Osamu Nozawa, Hiroaki Shishido | 2016-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436079 | Phase shift mask blank, method of manufacturing the same, and phase shift mask | Osamu Nozawa, Hiroaki Shishido | 2016-09-06 |