AS

Atsushi Shimada

TL Tokyo Electron Limited: 2 patents #101 of 758Top 15%
Overall (2016): #158,317 of 481,213Top 35%
2
Patents 2016

Issued Patents 2016

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9362167 Method of supplying cobalt to recess Shinji Furukawa, Tatsuo Hatano 2016-06-07
9313895 Method for forming copper wiring Tadahiro Ishizaka, Kenji Suzuki 2016-04-12